Substrate fixture pallet and substrate processor

ABSTRACT

A substrate fixture pallet includes a body part configured to receive a substrate to be processed and a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part. The lid part is configured to form a gap between the body part and the lid part when closed relative to the body part so as to allow the suction air of a dust collector for suctioning cutting powder to be generated at a time of processing the substrate to flow through the gap when the substrate fixture pallet is attached to the dust collector.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is based upon and claims the benefit of priority of the prior Japanese Patent Application No. 2008-220172, filed on Aug. 28, 2008, the entire contents of which are incorporated herein by reference.

FIELD

A certain aspect of the embodiment discussed herein is related to a substrate fixture pallet and a substrate processor.

BACKGROUND

Recently, there has been an increasing demand for printed (circuit) boards provided with electronic components with high density as electronic apparatuses become smaller in size and higher in performance. It is often the case that printed boards have complicated shapes corresponding to the shapes of electronic apparatuses. For example, if electronic apparatuses are cellular phones, various printed boards corresponding to various forms of cellular phones are manufactured.

However, in the case of automated mounting of electronic components, changing the specifications of a mounting machine for each printed board shape would increase the cost of facilities. Therefore, a substrate or panel having a predetermined rectangular shape is prepared, and multiple printed boards shaped correspondingly to an electronic apparatus are formed in the substrate. Such a substrate including multiple printed boards may be referred to as a multi-board substrate.

In this case, since the multi-board substrate has a rectangular shape and the printed boards have a shape corresponding to the electronic apparatus, the multi-board substrate inevitably includes a frame-shaped unnecessary part (hereinafter referred to as “frame-shaped unnecessary part”) around the printed boards. Therefore, the frame-shaped unnecessary part and the printed boards are separated in mounting the printed boards on electronic apparatuses.

The printed boards are separated from the multi-board substrate by forming grooves at peripheral parts to be cut of the printed boards and forming connection parts connecting the printed boards and the frame-shaped unnecessary part at some points in the peripheral parts. Then, after automatically mounting electronic components on each of the printed boards formed in the rectangularly-shaped multi-board substrate, the connection parts are removed at the time of mounting the printed boards on electronic apparatuses such as cellular phones. As a result, the printed boards are separated from the frame-shaped unnecessary part into pieces to be mounted on electronic apparatuses.

Known specific methods for removing connection parts include: (a) breaking connection parts by manual operations; (b) removing connection parts with a press using a mold and a jig for cutting; and (c) cutting connection parts with a router bit.

However, in the manual breaking operation of (a), labor and working hours due to manual operations become a great obstacle to productivity. Productivity may be improved with the cutting method of (b) using a press. However, this method requires preparation of expensive molds dedicated to corresponding printed boards of various shapes with electronic components mounted thereon, thus causing an inevitable increase in the cost of facilities.

On the other hand, the router bit method of (c), which enjoys high cutting-time productivity and requires low cost of facilities, is widely used for separating printed boards and the frame-shaped unnecessary part. (See, for example, Japanese Laid-open Patent Publication No. 2002-178295.) In the case of separating printed boards and the frame-shaped unnecessary part using this router bit method, the separating operation is performed while the multi-board substrate attached to a jig called a substrate fixture pallet is attached to a substrate processor. Therefore, the multi-board substrate is fixed to the substrate fixture pallet and prevented from being displaced at the time of cutting connection parts with a router bit. Therefore, the separating operation may be performed with high accuracy.

At the time of separating printed boards and the frame-shaped unnecessary part using the router bit method, connection parts are cut with a router bit, so that cutting powder that becomes dust is generated. As described in Japanese Laid-open Patent Publication No. 2002-178295, this cutting powder is suctioned through a dust collecting duct so as to prevent the cutting powder from adhering to printed boards or the substrate fixture pallet.

SUMMARY

According to an aspect of the invention, a substrate fixture pallet includes a body part configured to receive a substrate to be processed and a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part, the lid part being configured to form a gap between the body part and the lid part when closed relative to the body part so as to allow a suction air of a dust collector for suctioning a cutting powder to be generated at a time of processing the substrate to flow through the gap when the substrate fixture pallet is attached to the dust collector.

The object and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the claims.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and not restrictive of the invention, as claimed.

BRIEF DESCRIPTION OF THE DRAWING(S)

FIG. 1 is a diagram illustrating a substrate processor according to an embodiment;

FIGS. 2A, 2B, and 2C are a plan view, a front view, and a right side view, respectively, of a substrate fixture pallet according to the embodiment;

FIG. 3 is a bottom view of the substrate fixture pallet according to the embodiment;

FIG. 4 is an enlarged view of a dust collector and its neighborhood in the substrate processor according to the embodiment;

FIG. 5 is a plan view of an object to be processed by the substrate processor according to the embodiment;

FIG. 6 is a diagram illustrating the cutting of a connection part with a router bit according to the embodiment;

FIG. 7 is a perspective view of the substrate fixture pallet in an open state according to the embodiment; and

FIG. 8 is an enlarged view of a dust collector and its neighborhood in a substrate processor according to a variation of the embodiment.

DESCRIPTION OF EMBODIMENT(S)

As described previously, the cutting powder generated by cutting connection parts with a router bit at the time of separating printed boards and the frame-shaped unnecessary part using the router bit method may be suctioned through a dust collecting duct so as to prevent the cutting powder from adhering to printed boards or the substrate fixture pallet. Conventionally, however, the substrate fixture pallet has a single flat bottom surface and is provided on the placement table of the substrate processor (over the dust collecting duct), so that there is a problem in that the cutting power enters the space between the bottom surface of the substrate fixture pallet and the placement table of the substrate processor so as to adhere to the bottom surface of the substrate fixture pallet when the cutting power is suctioned through the dust collecting duct.

Generally, while attached to the substrate fixture pallet, separated printed boards are conveyed to a mounting line where the printed boards are taken out of the substrate fixture pallet and mounted on electronic apparatuses. At this point, if cutting powder is adhering to the bottom surface of the substrate fixture pallet, this cutting powder may adhere to the printed boards or electronic apparatuses. This adhesion of cutting powder to printed boards or electronic apparatuses may cause the circuits or electronic devices mounted on the printed boards or electronic apparatuses to malfunction.

A preferred embodiment of the present invention will be explained with reference to accompanying drawings.

FIG. 1 is a diagram illustrating a substrate fixture pallet 20A and a substrate processor 1 to which the substrate fixture pallet 20A is attached according to the embodiment. FIGS. 2A, 2B, and 2C and FIG. 3 are enlarged views of the substrate fixture pallet 20A.

Before a description is given of the substrate processor 1 and the substrate fixture pallet 20A, a description is given of a multi-board substrate (multi-board panel) 40, which is an object to be attached to the substrate fixture pallet 20A and processed by the substrate processor 1. FIG. 5 is a diagram illustrating a configuration of the multi-board substrate 40.

Referring to FIG. 5, the multi-board substrate 40 has multiple (three in this embodiment) printed (circuit) boards 41 formed therein. Electronic devices and the like are pre-mounted on each printed board 41 in a separate process. The multi-board substrate 40 has a predetermined rectangular shape in order to enable automated mounting of these electronic devices. While the multi-board substrate 40 thus has a rectangular shape, the printed boards 41 have a shape corresponding to an electronic apparatus. Therefore, the multi-board substrate 40 inevitably includes a frame-shaped unnecessary part 44 around the printed boards 41.

Separation grooves 43 are formed around the printed boards 41 at the boundary between the printed boards 41 and the frame-shaped unnecessary part 44. These separation grooves 43 are not formed entirely around the periphery of the printed boards 41, and are discontinued or separated by connection parts 42. That is, the printed boards 41 are connected to the frame-shaped unnecessary part 44 through the connection parts 42. These connection parts 42 have enough strength to prevent the printed boards 41 from being detached from the frame-shaped unnecessary part 44 at the time of mounting electronic devices on the printed boards 41.

The substrate processor 1 illustrated in FIG. 1 separates the printed boards 41 and the frame-shaped unnecessary part 44 by cutting and removing the connection parts 42 with a processing tool such as a router bit 6 as illustrated in FIG. 6. The router bit 6, which has one or more hard blades formed on the periphery of its shaft-shaped body part, rotates at high speed to form a groove on an object to be processed. Referring to FIG. 6, the connection part 42 may be removed by inserting this router bit 6 in the separation groove 43 and moving the router bit 6 in the direction indicated by arrow as illustrated.

As illustrated in FIG. 5, the connection parts 42 are formed at multiple points on the periphery of the printed circuit boards 41. The substrate processor 1 removes each connection part 42 with the router bit 6, thereby separating the printed boards 41 and the frame-shaped unnecessary part 44.

Next, a description is given of the substrate processor 1. Referring to FIG. 1, the substrate processor 1 includes a base 2, a processor body 3, a dust collector 4A, a suction unit 10, and a controller 12.

The processor body 3 includes a router head 5, the router bit 6, and a router mover 7. The router head 5 has a motor (not graphically illustrated) provided inside, and the router bit 6 is provided at the lower end of the rotational shaft of the motor. Therefore, the router bit 6 is rotated by the router head 5. This motor is connected to a router controller 13, which is connected to the controller 12.

The router mover 7 supports the router head 5 and moves the router head 5 three-dimensionally. A drive part for moving the router head 5 is provided inside the router mover 7. Examples of the drive part include a motor, an air cylinder, and an oil-hydraulic cylinder. According to this embodiment, the router head 5 is moved using a motor.

The motor provided in the router head 5 is connected to the controller 12 through the router controller 13. Further, the motor provided in the router mover 7 is connected to the controller 12 through a mover controller 14. The controller 12 performs general control of the overall operation of the substrate processor 1. Data on the shape of the multi-board substrate 40 (including data on the positions of the connection parts 42 and data on the positions of the separation grooves 43) are prestored in the controller 12. The controller 12 drives and controls the router controller 13 and the mover controller 14 based on these shape data.

The dust collector 4A includes an attachment table 8, a dust collecting nozzle 9, and the suction unit 10. The substrate fixture pallet 20A described below is attached to the upper side of the attachment table 8. This attachment table 8 is provided at the upper end of the dust collecting nozzle 9. This dust collecting nozzle 9 has a substantially quadrangular pyramid shape and is open at its upper end in FIG. 1. Further, the lower end of the dust collecting nozzle 9 is connected to a duct 11. Referring to FIG. 4, an opening 8 a is formed in the attachment table 8. The opening 8 a and the upper end of the dust collecting nozzle 9 communicate with each other.

Referring to FIG. 1, the duct 11 extends rightward along the base 2 to be connected to the suction unit 10. Therefore, by driving the suction unit 10, the cutting powder generated at the time of cutting the connection parts 42 with the router bit 6 is suctioned and removed through the dust collecting nozzle 9. Further, the suction unit 10 is connected to the controller 12 to be driven and controlled by the controller 12. A description is given below of a specific route through which the cutting powder is removed inside the substrate fixture pallet 20A.

Next, a description is given, with reference to FIGS. 2A through 2C, FIG. 3, and FIG. 7, of the substrate fixture pallet 20A. FIGS. 2A, 2B, and 2C are a plan view, a front view, and a right side view, respectively, of the substrate fixture pallet 20A. FIG. 3 is a bottom view of the substrate fixture pallet 20A. FIG. 7 is a schematic perspective view of the substrate fixture pallet 20A in an open state.

The substrate fixture pallet 20A includes a pallet body 21 and a lid body 22. The pallet body 21 and the lid body 22 are connected with hinges 23 so that the lid body 22 is openable and closable relative to the pallet body 21. Further, the lid body 22 has magnets 27 provided on a side opposite to the side on which the hinges 23 are provided. This lid body 22 is configured to cover the entire upper surface of the multi-board substrate 40 so as to not only fix the multi-board substrate 40 but also serve as a protective cover for the multi-board substrate 40.

These magnets 27 are attachable through magnetic attraction to corresponding fixation parts (not graphically illustrated) formed of a magnetic material and provided on the pallet body 21. This causes the lid body 22 to be fixed to the pallet body 21 through the magnetic attraction (force) of the magnets 27. Further, the lid body 22 may be made open relative to the pallet body 21 by urging the lid body 22 in a direction to open the lid body 22 with a force greater than the magnetic force of the magnets 27.

FIG. 2A illustrates the substrate fixture pallet 20A in a closed state, where the multi-board substrate 40 (indicated by a one-dot chain line in FIG. 2A) is attached onto the pallet body 21 with the lid body 22 closed. Multiple recesses 24 and 25 are formed in the pallet body 21 so as to correspond to the printed boards 41 formed in the multi-board substrate 40. The electronic devices mounted on the printed boards 41 project from their surfaces, but are accommodated in the recesses 24 and 25. This ensures the containing of the multi-board substrate 40 inside the substrate fixture pallet 20A.

Multiple spacer projections 28 are formed on the pallet body 21. When the lid body 22 is closed, these spacer projections 28 press the multi-board substrate 40 against the lid body 22, so that the multi-board substrate 40 is fixed inside the substrate fixture pallet 20A. Further, as illustrated in FIG. 4, with the lid body 22 closed, a gap (space) 29 (for example, an interval of 0.2 mm to 1.0 mm) corresponding to the height of the spacer projections 28 is formed between the pallet body 21 and the lid body 22.

By suctioning air through this gap 29, the gap 29 forms a passage or channel for the suctioned air. The size (vertical dimension) of the gap 29 is determined so as to be larger in size than the cutting powder (particles) generated at the time of cutting the connection parts 42 with the router bit 6. This allows the cutting powder generated on the upper side of the substrate fixture pallet 20A to be suctioned. For convenience of graphical representation, the multi-board substrate 40 is omitted in FIG. 4.

Further, communication holes 26 are formed through the pallet body 21 at predetermined positions (positions inside the recesses 25 in this embodiment) in the pallet body 21. Therefore, the communication holes 26 are open on a bottom surface 37 of the pallet body 21 as illustrated in FIG. 3. The communication holes 26 are provided so that the dust collection nozzle 9 communicates with the inside of the substrate fixture pallet 20A through the communication holes 26 when the substrate fixture pallet 20A is attached to the attachment table 8.

Further, body grip parts 31 are provided on both sides (right and left sides in FIG. 2A) of the pallet body 21. These body grip parts 31 are used when the substrate fixture pallet 20A is attached to or detached from the attachment table 8.

As described above, the lid body 22 is openable and closable relative to the pallet body 21. Multiple router holes 30 are formed in the lid body 22. The positions where the router holes 30 are formed are determined so as to correspond to the positions where the connection parts 42 of the multi-board substrate 40 are formed when the lid body 22 is closed with the multi-board substrate 40 attached to the pallet body 21. That is, the connection parts 42 of the multi-board substrate 40 are exposed (outside) through the router holes 30 with the lid body 22 closed. Further, the router holes 30 are sized so as to allow the router bit 6 of the substrate processor 6 to be inserted and cut the connection parts 42.

Further, lid body grip parts 32 are provided on both sides (right and left sides in FIG. 2A) of the lid body 22. These lid body grip parts 32 are used when the lid body 22 is being opened or closed.

Here, taking a look at the bottom surface 37 of the pallet body 21, leg parts 36 are formed at the four corners and groove parts 38 are formed between the leg parts 36 in the substrate fixture pallet 20A of this embodiment as illustrated in FIG. 3. The groove parts 38 are depressed relative to the surfaces (bottom surfaces) of the leg parts 36. The groove parts 38 serve as passages by which the outside of the substrate fixture pallet 20A communicates with the dust collecting nozzle 9 when the substrate fixture pallet 20A is attached to the attachment table 8. (Hereinafter, these groove parts 38 are referred to as “air passages 38.”)

The air passages 38 are configured to form gaps of 0.2 mm to 1.0 mm in height (vertical dimension) relative to the surface of the attachment table 8 when the substrate fixture pallet 20A is attached to the attachment table 8. These gaps (intervals) are larger than the size of the cutting powder (particles) generated at the time of cutting the connection parts 42 with the router bit 6. Further, the lengths or longitudinal dimensions of the air passages 38 may be set to any values as long as the leg parts 36 maintain enough strength.

In this embodiment, each side of the substrate fixture pallet 20A is provided with one air passage 38. Alternatively, the air passage 38 of each side may be divided so as to have multiple air passages 38 on each side. Further, according to this embodiment, the air passages 38 have a cross-sectional shape that is uniform in height relative to the upper surface of the attachment table 8 as illustrated in FIG. 4. Alternatively, any of the air passages 38 may have an inclined upper surface so as to increase or decrease its passage area toward inside from outside. By thus changing the shape of one or more of the air passages 38 in a suitable manner, a flow of suction air (air flow caused by suction) may be controlled or regulated as described below.

Next, a description is given of the behavior of the cutting powder generated at the time of attaching the substrate fixture pallet 20A configured as described above to the substrate processor 1 and removing the connection parts 42 of the multi-board substrate 40 using the router bit 6.

Referring to, for example, FIG. 1, the substrate fixture pallet 20A having the multi-board substrate 40 attached thereto is attached to the substrate processor 1. Then, the controller 12 activates the router head 5 through the router controller 13 to cause the router bit 6 to rotate, while driving the router mover 7 through the mover controller 14 to start cutting the connection parts 42 of the multi-board substrate 40 with the router bit 6. The controller 12 also activates the suction unit 10 to start suctioning cutting powder from the dust collecting nozzle 9 through the duct 11.

For example, the substrate processor 1 removes the connection parts as follows. First, the controller 12 selects or determines one of the connection parts 42 to be removed based on the prestored shape data of the multi-board substrate 40. Next, the controller 12 reads the position data of the connection part 42 to be removed, and drives the router mover 7 to move the router bit 6 to a position above the connection part 42 to be removed.

Next, the controller 12 drives the router mover 7 to insert the router bit 6 into one of the separation grooves 43 adjacent to the connection part 42 to be removed through the corresponding router hole 30 formed in the substrate fixture pallet 20A. FIG. 6 is an enlarged view illustrating the router bit 6 thus inserted into the adjacent (corresponding) separation groove 43.

Next, the controller 12 controls the router mover 7 so as to move the router bit 6 in the direction indicated by arrow in FIG. 6. As a result, the connection part 42 (to be removed) formed in the multi-board substrate 40 is cut by the router bit 6. The controller 12 controls the driving of the router mover 7 so as to perform this cutting operation on each connection part 42.

By removing all of the connection parts 42, the multiple (three in this embodiment) printed boards 41 are separated from the frame-shaped unnecessary part 44. However, with the lid body 22 closed, the printed boards 41 and the frame-shaped unnecessary part 44 remain fixed and are prevented from moving inside the substrate fixture pallet 20A.

At the time of cutting the connection parts 42 with the router bit 6 as described above, cutting powder that becomes dust is generated. This cutting powder is carried by the suction air generated by the driving of the suction unit 10 so as to be suctioned from the dust collecting nozzle 9 to the suction unit 10 through the duct 11 to be discharged from a discharge unit (not graphically illustrated).

Here, a description is given, with reference to FIG. 4, of a flow of the suction air caused in the substrate fixture pallet 20A in the case of using the substrate fixture pallet 20A.

In the substrate fixture pallet 20A of this embodiment, the spacer projections 28 are provided so that the gap 29 is formed between the pallet body 21 and the lid body 22 when the substrate fixture pallet 20A is in a closed state as described above. The height (vertical dimension) of this gap 29, or the interval or distance between the pallet body 21 and the lid body 22, is determined to be larger than the shape (size) of the cutting powder (particles) generated at the time of cutting the connection parts 42.

Further, the gap 29 is connected to the outside air on its outer side and is connected to the dust collecting nozzle 9 through the communication holes 26 formed in the pallet body 21 and the opening 8 a formed in the attachment table 8 on its inner side. Therefore, the suction air generated by the driving of the suction unit 10 serves as an influx route into the dust collecting nozzle 9 through the gap 29, the communication holes 26, and the opening 8 a. (This flow of suction air is indicated by broken arrows in FIG. 4.) The communication holes 26 may also serve as a communication path connecting the gap 29 and the air passages 38.

Therefore, even if cutting powder enters the space between the pallet body 21 and the lid body 22 during the cutting of the connection parts 42 with the router bit 6, it is ensured that this cutting powder is discharged to the dust collecting nozzle 9 with the suction air flowing through the gap 29.

On the other hand, the air passages 38 are formed on the bottom surface 37 side of the pallet body 21 in the substrate fixture pallet 20A of this embodiment. The height (vertical dimension) of the air passages 38, or the depth of the air passages 38 relative to the bottom surfaces of the leg parts 36, is determined to be larger than the shape (size) of the cutting powder (particles) generated at the time of cutting the connection parts 42.

The air passages 38 are connected to the outside air on their outer sides and are connected to the dust collecting nozzle 9 through the opening 8 a formed in the attachment table 8 on their inner sides. Accordingly, the suction air generated by the driving of the suction unit 10 serves as an influx route into the dust collecting nozzle 9 through the air passages 38 and the opening 8 a. (This flow of suction air is indicated by solid arrows in FIG. 4.)

Therefore, even if cutting powder enters the space on the bottom surface 37 of the pallet body 21 (specifically, the space between the pallet body 21 and the attachment table 8) during the cutting of the connection parts 42 with the router bit 6, it is ensured that this cutting powder is discharged to the dust collecting nozzle 9 with the suction air flowing through the air passages 38.

By forming a passage of suction air using the substrate fixture pallet 20A of this embodiment as described above, the cutting powder generated during the cutting of the connection parts 42 with the router bit 6 is prevented from remaining in or on the substrate fixture pallet 20A.

Accordingly, when the substrate fixture pallet 20A is carried in to a mounting line where the printed boards 41 are mounted on electronic apparatuses after the cutting of the connection parts 42, and the printed boards 41 are taken out of the substrate fixture pallet 20A, no cutting powder adheres to the printed boards 41 or electronic apparatuses because no cutting powder is adhering to the substrate fixture pallet 20A. This increases the reliability of printed boards and electronic apparatuses.

FIG. 8 illustrates a variation according to this embodiment. FIG. 8 is an enlarged view of part of a dust collector 4B and its neighborhood in a substrate processor. In FIG. 8, the same elements as those illustrated in FIG. 1 through FIG. 7 are referred to by the same reference numerals, and a description thereof is omitted where appropriate.

In the embodiment described above with reference to FIGS. 2A through 4, the air passages 38 are provided by forming grooves in the pallet body 21 of the substrate fixture pallet 20A, thereby causing suction air to flow on the bottom surface 37 side of the pallet body 21 as well so as to prevent cutting powder from adhering to the bottom surface 37 of the pallet body 21.

On the other hand, according to this variation, passage spacers 45 are provided on the upper surface of the attachment table 8. Further, unlike in the substrate fixture pallet 20A illustrated in FIGS. 2A through 4, no grooves forming the air passages 38 are formed in a substrate fixture pallet 20B employed in this variation.

At the time of attaching the substrate fixture pallet 20B to the attachment table 8, the substrate fixture pallet 20B is attached on top of the passage spacers 45 provided on the attachment table 8. That is, when the substrate fixture pallet 20B is attached to the attachment table 8, the substrate fixture pallet 20B is placed on the passage spacers 45.

Therefore, the (upper) surface of the attachment table 8 and the bottom surface of the substrate fixture pallet 20B (the bottom surface 37 of the pallet body 21) are spaced apart from each other, so that the space between the surface of the attachment table 8 and the bottom surface of the substrate fixture pallet 20B serves as an air passage 48 where suction air flows. The height (vertical dimension) of this air passage 48, or the distance or interval between the surface of the attachment table 8 and the bottom surface of the substrate fixture pallet 20B, is determined to be larger than the shape (size) of the cutting powder (particles) generated at the time of cutting the connection parts 42 as in the case of the above-described air passages 38.

Further, the air passage 48 is connected to the outside air on its outer side and is connected to the dust collecting nozzle 9 through the opening 8 a formed in the attachment table 8 on its inner side. Therefore, the suction air generated by the driving of the suction unit 10 serves as an influx route into the dust collecting nozzle 9 through the air passage 48 and the opening 8 a. (This flow of suction air is indicated by solid arrows in FIG. 8.)

Therefore, even if cutting powder enters the space on the bottom surface 37 of the pallet body 21 (specifically, the space between the pallet body 21 and the attachment table 8) during the cutting of the connection parts 42 with the router bit 6, it is ensured that this cutting powder is discharged to the dust collecting nozzle 9 with the suction air flowing through the air passage 48.

Thus, also by providing the passage spacers 45 on the attachment table 8, the cutting powder generated during the cutting of the connection parts 42 with the router bit 6 is prevented from remaining in or on the substrate fixture pallet 20B.

Thus, according to one aspect of the present invention, cutting powder is prevented from adhering to a substrate fixture pallet at the time of dividing a substrate or workpiece.

All examples and conditional language recited herein are intended for pedagogical purposes to aid the reader in understanding the invention and the concepts contributed by the inventor to furthering the art, and are to be construed as being without limitation to such specifically recited examples and conditions, nor does the organization of such examples in the specification relate to a showing of the superiority or inferiority of the invention. Although the embodiment of the present inventions has been described in detail, it should be understood that various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention. 

1. A substrate fixture pallet, comprising: a body part configured to receive a substrate to be processed; and a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part, the lid part being configured to form a gap between the body part and the lid part when closed relative to the body part so as to allow a suction air of a dust collector for suctioning a cutting powder to be generated at a time of processing the substrate to flow through the gap when the substrate fixture pallet is attached to the dust collector.
 2. The substrate fixture pallet as claimed in claim 1, wherein the body part includes an air passage provided on a surface thereof on a side opposite to the gap.
 3. The substrate fixture pallet as claimed in claim 2, wherein the body part further includes a communication path connecting the gap and the air passage.
 4. A substrate processor, comprising: a processor body configured to process a substrate using a processing tool; an attachment table to which a substrate fixture pallet having the substrate fixed thereto is to be attached; a dust collector configured to suction a cutting powder to be generated at a time of processing the substrate; and a spacer provided on the attachment table, the spacer being configured to form a gap between the attachment table and the substrate fixture pallet when the substrate fixture pallet is attached to the attachment table, the gap serving as an air passage through which a suction air of the dust collector flows to suction the cutting powder.
 5. The substrate processor as claimed in claim 4, further comprising: the substrate fixture pallet, the substrate fixture pallet including: a body part configured to receive the substrate; and a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part, the lid part being configured to form an additional gap between the body part and the lid part when closed relative to the body part so as to allow the suction air of the dust collector to flow through the additional gap.
 6. The substrate processor as claimed in claim 4, wherein the attachment table is configured to allow the substrate fixture pallet to be attached thereto and detached therefrom.
 7. The substrate processor as claimed in claim 4, wherein the processing tool is a router bit. 